等离子表面清洗机：可以用于清洗硅片，玻璃，塑料等，去除因静电吸附在表面的灰尘。也可以起到表面活化的作用，通过等离子体轰击产生表面自由基，使其活化。
Plasma: To clean the surface of wafer, glass, plastic, etc. and get rid of the dust on which due to static. Also, it can activate the surface by plasma treatment to produce free radical.