电阻蒸发镀膜机
蒸镀样品最大尺寸为6英寸样片，可同时蒸镀3片4英寸样片，衬底温度最高可到350℃
Thermal Evaporator
The thermal evaporator is suitable to deposite metal onto up to 3 wafers simultaneously. The position of sample holder can be adjusted to avoid over heating of substrate during the evaporation.